Glass wafers Optical& Semi grade

Item No.: SGS

already up to 450mm diameter
Item 4" 6" 8" 12"
Material Type Schott Borofloat33/B270/BK7/D263&Corning Eagle XG/H-K9L etc
Diameter(round or square) (mm) 100 150 200 300
Tol(±mm) 0.3 0.3 0.3 0.5
Thickness (mm) ≥0.15 ≥0.25 ≥0.3 ≥0.3
Primary flat (mm) 32±2 57.5/42±2 notch notch

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5 Glass wafers Optical& Semi grade

Description

Depending on the application:

Semiconductor applications
Micro lithography/Image Forming Optics
Substrates for anodic bonding
Optical substrates/Mirror substrates
Micro system technology/mechanics
Microstructure applications
Laboratory and Coating Substrates
LCD Covers/Chip Masks
General optical applications/Optical Windows
Substrates for mirror coatings/filter coatings
Measurement and Sensor-Technology

Running materials selected:

1.Borofloat33/B270/D263/BK7 etc.
2.Pyrex and Eagle XG glass etc.
3.H-K9L glass/ Soda Lime /H-ZF/MJB5 and other High alumina silica glass etc.

Running Specifications: already up to 450mm diameter

Item	4"	6"	8"	12"
Material Type	Schott Borofloat33/B270/BK7/D263&Corning Eagle XG/H-K9L etc
Diameter(round or square) (mm)	100	150	200	300
Tol(±mm)	0.3	0.3	0.3	0.5
Thickness (mm)	≥0.15	≥0.25	≥0.3	≥0.3
Primary flat (mm)	32±2	57.5/42±2	notch	notch
LTV (5mmx5mm) (µm)	< 1	< 1	< 1	< 2
TTV (µm)	< 1.5	< 3	< 5	< 5
Bow (µm)	±20	±30	±40	±50
Warp (µm)	≤ 25	≤ 30	≤ 50	≤ 60
PLTV (<0.5µm within 5*5mm) %	≥95%	≥95%	≥95%	≤ 95%
Edge bevel	According with IEC62276& SEMI M1.2 Standard
Polished side Ra (nm)	≤1
Surface S/D	<40/20
Surface quality	zero grade

Customization acceptable

Glass wafers Optical& Semi grade

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